介绍采用多次电镀Ｎｉ图形转移工艺将激光干涉法获得的耦合在光刻胶表面的起伏图形进行复制以获得Ｎｉ基图形转移模板，并进一步将表面起伏图形复制到聚苯乙烯薄膜的表面，以获得具有表面起伏图形的平面调制靶。为提高图形转移的精度、研究电镀图形转移工艺和聚苯乙烯薄膜图形复制工艺对表面起伏图形转移精度的影响，以扫描电子显微镜对整个图形转移流程进行监控，比较光刻胶表面图形，一次、二次电镀转移图形和转移到聚苯乙烯上图形的形貌。 This paper introduces the use of Ni electroplating multiple transfer electroplating laser interferometry obtained on the surface of the photoresist pattern is copied to obtain Ni-based pattern transfer template, and further the surface relief pattern is copied to the surface of the polystyrene film to A planar modulation target with a surface relief pattern was obtained. In order to improve the accuracy of pattern transfer, the effects of electroplating pattern transfer process and polystyrene film pattern replication process on the transfer accuracy of surface undulation pattern were studied. The whole pattern transfer process was monitored by scanning electron microscope, the photoresist surface pattern was compared once, Secondary plating transfers the pattern and morphology of the pattern transferred to the polystyrene.