magnetron相关论文
A well-established method is highly desirable for growing topological insulator thin films with low carrier density on a......
采用孪生对靶直流磁控溅射的方法,在室温下制备了ZnO：Al（ZAO）薄膜材料,将其应用于柔性衬底非晶硅薄膜太阳电池的窗口电极。通过调整Ar......
The structure and microfabrication,the detecting theory and the way of biomolecular recognition device based on giant ma......
200 nm Fe-N thin films deposited on glass substrates by RF sputtering were vacuum annealed at 250-350℃ under 12000 A/m ......
Highly oriented multiple boron nanowire nanojunctions with unilateral feather- like morphology were first successfully p......
The design, fabrication and characterization of the X-ray supermirrors are discussed in this paper. Using the local opti......
One-dimensionally nanostructured materials, such as nanowires and nanotubes, are the smallest dimensional structures for......
Thin films of perovskite manganese oxide La0.66Ca0.29K0.05MnO3(LCKMO) on Au/ITO(ITO=indium tin oxide) substrates were pr......
A uniform and dense TiO2 film was grown on the surface of porous NiTi shape memory alloys(SMAs) successfully by RF magne......
The Tb40(Fe49Co49V2)60 films were fabricated by magnetron cosputtering from a multiple target arrangement at different a......
Influence of Nitrogen Flow Ratio on the Microstructure, Composition, and Mechanical Properties of DC
Nanocrystalline ZrB 2 film and nanocomposite Zr-B-O-N films were prepared by non-reactive as well as reactive magnetron ......
Effects of growth temperature on the structural and electrical properties of Li-N-H codoped ZnO thin films grown by DC r......
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Although most transition metals have been tested as the promoter to Pt for electrocatalysis toward fuel cell reactions,s......
Improved electrochemical hydrogen storage properties of Mg-Y thin films as a function of substrate t
Pd-capped Mg_(78)Y_(22) thin films have been prepared by direct current magnetron co-sputtering system at different subs......
Structural, Optical and Electrical Properties of Ga Doped ZnO/Cu grid/Ga Doped ZnO Transparent Elect
Ga doped ZnO(GZO)/Cu grid/GZO transparent conductive electrode(TCE) structures were fabricated at room temperature(RT) b......
Effect of Nitrogen Content on Microstructures and Mechanical Properties of WB_2(N) Films Deposited b
In the present study,WB_2(N) films are fabricated on silicon and YG8 substrates at different N_2 pressures by reactive m......
In-situ synthesis of TiO_2 rutile/anatase heterostructure by DC magnetron sputtering at room tempera
TiO_2 rutile/anatase heterostructure thin films with varying rutile thickness have been in-situ synthesized via DC magne......
Hydrogen, the cleanest and most promising energy vector, can be produced by solar into chemical energy conversion, eithe......
Blue photoluminescence from nanocrystalline porous silicon structure fabricated by high-current puls
N-type Si(111) wafers have been processed by high-current pulsed electron beam(HCPEB) treatment with an increasing numbe......
Influence of Annealing Temperature on the Microstructure and Electrical Properties of Indium Tin Oxi
Indium tin oxide(ITO) thin films were prepared on alumina ceramic substrates by radio frequency magnetron sputtering.The......
Preparation of Lead-based Perovskite Structure Ferroelectric Thin Films by Sol-Gel Method and the Pr
Polycrystalline PZT,PLT and PbTiO ferroelectric thin films,highly oriented PbTiOferroelectric thin films and epitaxial ......
Magnetic anisotropy of Fe films deposited by dc magnetron sputtering under an external magnetic fiel
Magnetic Fe films grown on single-crystal Mg O(001) and(011) substrates were prepared by direct current magnetron sputte......
Mn-doped Cu_3N films were deposited by cylindrical magnetron sputtering equipment on the common glass at room temperatur......
IN 1938, antireflection coatings were prepared by Americans. Later, they were successfullygot by Europeans. The antiref......
提出一个用磁控溅射制备碳化硅薄膜的简化热力学模型。首先选出构成β－ C3N4,P－ C3N4 或 － (C2N2)n－的最可能表面反应 ,然后通过求解......
In order to achieve low cost high efficiency thin film solar cells,a novel Semiconductor Photovoltaic (PV) active mat......
A novel method was used to fabricate AIN coating on graphite substrate.This approach included two steps:firstly,the emul......
Growth and structural properties of silicon on Ag films prepared by 40.68 MHz very-high-frequency ma
The growth of silicon on Ag films via 40.68 MHz very-high-frequency(VHF) magnetron sputtering was investigated. The ener......
Owing to both of its high carrier concentration and large band gap, ZnO:Al (ZAO) films which is an n-type degenerate sem......
In this paper, properties on pulsed radiation detections of ZnO:Ga crystal grew by a magnetron sputtering method were st......
Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputte
Aluminum nitride (AlN) thin films with high c-axis orientation have been prepared on a glass substrate with an Al bottom......
The growth and structural properties of Ag films prepared by radio-frequency(2, 13.56 and27.12 MHz) and very-high-freque......
Characterization and Properties of Duplex a-C:H/MAO Coatings on Magnesium Alloy using Combined Micro
The combined microarc oxidation(MAO) and magnetron sputtering deposition process was used to deposit duplex a-C:H/MAO an......
The transparent ITO/Ag/ITO multi-layers are developed as anodes on flexible PET (poly(ethylene terephthalate)) substrat......
Based on the design theory of soft X-ray optical multilayer thin films and magneto-optic multilayer thin films, the meta......
Hexagonal microtube ZnO was firstly grown on single crystal p-Si (111) substrates by hydrothermal method, and fabricated......
A simple and easily operated technique was developed to fabricate GaN films. GaN films possessing hexagonal wurtzite str......
Pulsed laser deposition(PLD) is emerging as the most rapid and efficient technique for fabricating the many compound fil......
Si-rich silicon oxide films were deposited by RF magnetron sputtering onto composite Si/SiO_2 targets. After annealed at......
The phosphorus-doped ZnO films were prepared on glass substrate by radio-frequency (RF) magnetron sputtering at differen......
Comparison between Top and Bottom NiO-pinning Spin Valves: Effect of Interfacial Roughness on Specul
Top and bottom NiO-pinning spin valves of Si/Ta/NiO/Co/Cu/Co/Ta and Si/Ta/Co/Cu/Co/NiO/Ta were prepared by magnetron spu......
Sm and Gd co-doped Ceria (SGDC:Sm_(0.1)Gd_(0.1)Ce_(0.8)O_(1.90)) films as the electrolytes were investigated for the IT-......
Fabrication of Diamond-like Carbon Films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputt
Diamond-like carbon (DLC) films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron ......
Porous anodic alumina (PAA) hosts with ZnO nanoparticles loaded in were prepared by immersing PAA films in an aqueous so......
We have comparatively studied the addition of Cr and V in titania.Cr and V content were changed by means of insets place......
In an attempt of being used as buffer layers and electrodes for the textured BaTiO3 (BTO) ferroelectric thin films, high......
The B4C/Mo/Si high reflectivity multilayer mirror was designed for He-Ⅱradiation (30.4 nm) using the layer-by-layer met......
用射频磁控溅射法在Si(100)衬底上生长了一组Zn1-xMgxO(x=0~0.16)薄膜。并在不同温度下退火。对薄膜的光致发光研究表明,在薄膜的......
Formation of GaN Nanowires by Ammoniating Ga_2O_3 Films Deposited on Oxidized Al Layers on Si Substr
Large quantities of gallium nitride(GaN) nanowires have been prepared via ammoniating the Ga2O3 films deposited on the o......
