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用RF溅射方法在不同的基片温度下制备了非晶态和晶态NdFeB溥膜合金。研究了薄膜合金的磁各向异性。在600℃溅射得到的晶态样品具有强的垂直各向异性和高的矫顽力。由非晶态晶化得到的晶态合金也呈现了较强的垂直各向异性。
The amorphous and crystalline NdFeB films were prepared by RF sputtering at different substrate temperatures. The magnetic anisotropy of thin film alloy was studied. Crystalline samples sputtered at 600 ° C have strong vertical anisotropy and high coercivity. Crystalline alloys obtained from non-crystalline crystallization also exhibit strong perpendicular anisotropy.