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引言 非晶态磁性材料具有高电阻率、高磁导率、低矫顽力、低损耗以及耐磨损、耐腐蚀等优异特性。尤其是Co基非晶薄膜磁导率高频特性优于坡莫合金,是一种理想的薄膜磁头材料。但是制备态的非晶膜存在很大的内应力,σ约为10~9～10~(10)dyne/cm~2,即使对λ_s为10~(-7)的Co基膜,其应力各向异性K_σ仍有10~2—10~3erg/cm~3。再加上由于材料成分、密度涨落,原子偏聚,指向有序化造成的内部结构各向异性,表面形貌不平产生的表面各向异性,使制备态样品
Introduction Amorphous magnetic materials have excellent properties such as high resistivity, high magnetic permeability, low coercivity, low loss, abrasion resistance and corrosion resistance. In particular, Co-based amorphous film permeability is better than permalloy high-frequency properties, is an ideal thin film magnetic head material. However, the as-prepared amorphous film has a large internal stress σ of about 10 9 to 10 10 dyne / cm 2. Even for a Co-based film having a λ_s of 10 -7, the stress The opposite sex K_σ is still 10 ~ 2-10 ~ 3erg / cm ~ 3. Coupled with the anisotropy of the internal structure due to the composition of the material, the density fluctuations, the segregation of the atoms, the orientation of the ordered structures, and the surface anisotropy resulting from uneven surface morphology, the prepared samples