在设计大规模积成电路、高频晶体管及其它高级组件时,常常需要小于1微米的尺寸,但是,即使最好的光掩模准直台,其尺寸精度的极限也只有1微米。一些研究人员试图设计出一些新型的准直台以解决这一难题。例如,贝耳实验室就正在研制一种浮在气垫上以防止振动的工作台。 Size less than 1 micron is often required in the design of large scale integrated circuits, high frequency transistors, and other advanced components, but even the best photomask collimation bench has a limit of 1 micron of dimensional accuracy. Some researchers try to design some new type of collimation stage to solve this problem. For example, Bell Labs is working on a table that floats on the air cushion to prevent vibration.