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针对激光雷达测距系统的使用要求,通过对镀膜材料的光学特性、膜系设计和监控方法的分析,优化工艺参数,采用电子束真空镀膜的方法,同时加离子辅助系统,选用TiO2和SiO2氧化物硬质薄膜材料在HB830颜色玻璃基底上镀制窄带滤光膜。用maclod灵敏度算法分析膜层的相对灵敏度,减小厚度监控误差,改进制备工艺过程,寻求膜系的最佳控制方法。所镀膜层在垂直入射的条件下,905 nm波长的透过率达86%以上,半峰值宽度为23 nm,并且通过提高膜厚控制精度解决了中心波长漂移、膜层吸收等问题。该膜层能够承受激光光源的照射,抵御恶劣的使用环境。
According to the requirements of LIDAR ranging system, the optical properties of coating materials, the design and monitoring methods of membrane system are analyzed, the process parameters are optimized, the electron beam vacuum coating method is adopted, and the ion assisted system is added. Hard film material is coated with narrow-band filter on HB830 color glass substrate. Analysis of the relative sensitivity of the membrane using the maclod sensitivity algorithm to reduce the thickness monitoring error, improve the preparation process, to find the best control method of the membrane system. Under normal incident conditions, the transmittance of 905 nm wavelength reaches above 86% and the half-peak width is 23 nm. The problems of central wavelength shift and film absorption are solved by improving the control precision of film thickness. The film can withstand the irradiation of laser light source, against harsh environments.