一 引言 俄歇电子能谱(AES)是通过测定由电子束激发产生的俄歇电子的特征能量进行元素分析的一种固体表面薄层分析技术。近年来,发展非常迅速。它可以进行固体表面元素的点分析、线分析和二维分布的分析,如果配以离子腐蚀装置还可以进行元素的三线分布分析。由于它充分利用了固体表面激发出的各种可测信息,除俄歇电子外,尚有反射电子、二次电子、吸收电流等,不仅能用俄歇电子能谱进行 I. INTRODUCTION Auger electron spectroscopy (AES) is a solid surface thin layer analysis technique for elemental analysis by measuring the characteristic energies of Auger electrons generated by electron beam excitation. In recent years, the development is very rapid. It can be point analysis of solid surface elements, line analysis and analysis of two-dimensional distribution, if accompanied by ion etching device can also be three-element distribution of elements. Because it makes full use of the solid surface can stimulate a variety of measurable information, in addition to Auger electrons, there are reflective electrons, secondary electrons, absorption current, not only by Auger electron spectroscopy