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This paper has analyzed the AlxGa1 xAs liquid-phase epitaxy layer by Automatic Rotating-Analyzer Spectroscopic Ellipsometer. The energy of the incident light ranges from 1.959eV to 4.300eV. The refractivity n and extinction coefficient k of the epitaxy layer are found to be regularly changed with the x-values of the epitaxy layer.The n-E spectrum displayed a obvious peak among the measured values and the energy position related to the peak increases with increasing of x, which can be written as E= 2.88+ 0.87x. Thus the x value of the epitaxy layer can be obtained from the peak position of the n-E spectrum of the AlxGa1-xAs epitaxy layer by Automatic Rotating Analyzer Spectroscopic Ellipsometer.
The paper has analyzed the AlxGa1 xAs liquid-phase epitaxy layer by Automatic Rotating-Analyzer Spectroscopic Ellipsometer. The energy of the incident light ranges from 1.959eV to 4.300eV. The refractivity n and extinction coefficient k of the epitaxy layer are found to be regularly changed with the x-values of the epitaxy layer. nE spectrum displayed a obvious peak among the measured values and the energy position related to the peak increases with increasing x, which can be written as E = 2.88+ 0.87x. Thus the x value of the epitaxy layer can be obtained from the peak position of the nE spectrum of the AlxGa1-xAs epitaxy layer by Automatic Rotating Analyzer Spectroscopic Ellipsometer.