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多极头离子源技术已在融合和等离子加工的中性束加热方面获得了应用,但把这种离子源应用于离子注入的报道却少见。多极头离子源的几何形状能满足离子注入所希望的若干特征,具有束流引出面积大,产生静等离子体和形成手段灵活等特点。与常规的弗里曼源不同,它不需外加磁场、用于强流离子注入机的多极头离子源已研制成功,实验结果表明这种离子源的性能与标准弗里曼源相似,而且源的寿命更长。本文将介绍用BF_3作为掺杂气体的多极头离子源性能和寿命的实验结果。
Multipole ion source technology has been used in fusion and plasma processing of neutral beam heating applications, but the ion source used in this ion source is rarely reported. The geometry of the multipole ion source can satisfy a number of desirable features of ion implantation, with the advantages of large beam extraction area, static plasma generation and flexible means of formation. Unlike traditional Freeman sources, which do not require an applied magnetic field, a multipole ion source for a high-intensity ion implanter has been developed and experimental results show that this ion source behaves similarly to a standard Freeman source, and Source of life longer. This article will describe the experimental results of the performance and lifetime of a multipolar ion source using BF_3 as a doping gas.