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本文介绍了采用激光透射法测定铬掩模湿式腐蚀终点的装置和性能,它具有结构简单、检测性能良好,实用性强等特点,保证了铬掩模图形的腐蚀质量和一致性.
In this paper, the device and performance of the wet etching end point of the chromium mask by laser transmission are introduced. The device has the advantages of simple structure, good detection performance and strong practicability, and ensures the corrosion quality and consistency of the chromium mask pattern.