由我院自动化系李兴副教授等人承担的科研项目“具有温度高灵敏度的微型传感材料研究” ,于２０００年４月２８日通过了天津市科委组织并主持的专家鉴定。该项目属对温度变化具有高敏感材料特性及微机械中微型流量传感器的研究 ,采用半导体工艺技术和特殊的掺金工艺 ,通过硅材 By the Department of Automation Li Xing associate professor and others bear the scientific research project “with high temperature sensitivity of micro-sensing materials research”, on April 28, 2000 adopted by the Tianjin Science and Technology Commission and presided over the identification of experts. The project is a highly sensitive material properties of temperature changes and micro-flow sensor in the micro-mechanical research, the use of semiconductor technology and special gold-doped technology, through the silicon