论文部分内容阅读
本文报道了多孔硅的制备方法及形成条件,并对掺La(OH)_3多孔硅的感湿特性进行了实验研究,结果表明掺La(OH)_3多孔硅的交流阻抗随环境温度的增大而减少,呈近似线性规律,敏感度变化很小。掺La(OH)_3多孔硅化传统的LiCl敏感材料的繁感度有所提高。
In this paper, the preparation methods of porous silicon and the formation conditions of the porous silicon have been reported. The experimental results show that the AC impedance of doped La (OH) 3 porous silicon increases with the increase of ambient temperature And reduce, showing an approximately linear law, little change in sensitivity. The susceptibility of traditional LiCl-doped materials doped with La (OH) 3 porous silicate has been increased.