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N 和 Ti 注入 TiN 的射程和损伤已在本文中给出。N 和 Ti 注入 TiN 使其颜色发生了变化。试验结果表明,N 和 Ti 注入 TiN 均能使 TiN 的硬度增加.特别是 N 注入使注入层硬度提高更为显著.如5×10~(17)cm~(-2)的 N 注入 TiN,可使 TiN(此时 Ti/N 原子不再是1)的维氏硬度从2600提高到6000.为了分析 N 和 Ti 注入引起 TiN 硬度增加的原因,用 XPS 测量了 N 和 Ti 注入 TiN 所引起化学结构的变化。试验中观察到间隙 N 和 Ti2N 峰的出现.用扫描电镜观察了注入样品磨损后的形貌。据此讨论了 Ti 和 N 注入而引起 TiN 特性变化的机理。
The range and damage of N and Ti implanted TiN are given in this paper. Ti and Ti were infused into Ti and their colors changed. The experimental results show that the hardness of TiN can be increased by the injection of N and Ti into TiN, especially the increase of the hardness of the injected layer by N injection, such as N × 10 ~ (17) cm ~ (-2) The Vickers hardness of TiN (in this case Ti / N atom no longer 1) was increased from 2600 to 6000. To analyze the reason for the increase in hardness of TiN caused by N and Ti injection, the chemical structure caused by the injection of Ti and N into Ti and N was measured by XPS The change. The appearance of gap N and Ti2N peaks was observed in the experiment, and the morphology of the implanted samples was observed by scanning electron microscopy. Based on this, the mechanism of TiN properties change caused by Ti and N implantation is discussed.