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α—M_2O_3(M=cr,Fe,Al)在硅衬底上的薄膜的红外透射光谱和基于晶体结构的理论红外光谱十分一致。因此,这些氧化物薄膜的红外光谱可用于有关薄膜的物相鉴定,特别是对薄膜中贴近硅衬底片那层氧化物的物相鉴定更为有效。本文对这些氧化物薄膜硅衬底的相互作用也进行了讨论。
The infrared transmission spectra of α-M_2O_3 (M = cr, Fe, Al) thin films on silicon substrates are in good agreement with the theoretical infrared spectra based on the crystal structure. Therefore, the infrared spectra of these oxide films can be used for the phase identification of the relevant films, especially for the phase identification of the oxide layer close to the silicon substrate in the film. The interaction of these oxide thin film silicon substrates is also discussed in this paper.