论文部分内容阅读
本文报道在27keV Ar~+离子轰击Fe-W(30wt.％)合金情况下,溅射Fe和W原子的角分布实验结果。用卢瑟福背散射(RBS)谱仪分析了不同发射角θ处溅射沉积在衬底上的Fe-W薄膜的成分。结果表明,角分布形状均为over-cosine型,且W原子对Fe原子的比值与发射角θ有关。与我们以前关于Cu-Au合金和Ti-Ni合金的结果比较,暗示择优溅射程度可能与合金成分的质量比值有关。简单的模型分析发现,靶表面形貌是引起溅射原子角分布变化的重要因素。
This paper reports the angular distribution of Fe and W atoms sputtered by 27keV Ar ~ + ion bombardment of Fe-W (30wt.%) Alloy. The composition of the sputtered Fe-W thin film deposited on the substrate at different emission angles θ was analyzed by Rutherford Backscattering (RBS) spectrometer. The results show that all the angular distributions are over-cosine, and the ratio of W atoms to Fe atoms is related to the emission angle θ. In comparison with our previous results on Cu-Au alloys and Ti-Ni alloys, it suggests that the degree of preferential sputtering may be related to the mass ratio of the alloy components. Simple model analysis found that the target surface morphology is an important factor that causes the variation of atomic angle distribution of sputtering.