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本文简介我们最近研制成功的超高真空（ＵＨＶ）扫描隧道显微镜（ＳＴＭ）系统。该系统由于同时安装有扫描电子显微镜（ＳＥＭ），可以使ＳＴＭ的针尖在ＳＥＭ的引导下移到样品表面上任一感兴趣的地方去研究那里的纳米细节，从而使它的ＳＴＭ具有纳米结构可重入性。该系统还有一些特有的样品制备功能，可用于许多有应用价值的研究。
This article describes our recently developed ultra-high vacuum (UHV) scanning tunneling microscope (STM) system. The system, with the simultaneous installation of a scanning electron microscope (SEM), allows the STM tip to be moved under SEM guidance to any point of interest on the surface of the sample to investigate the nano-details there, rendering its STM nanostructured Into sexual. The system also has a number of unique sample preparation features that can be used for many valuable studies.