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在一次阳极氧化法制备多孔氧化铝(anodized aluminum oxide,AAO)的基础上,进行了二次、三次、四次氧化制备AAO,并对多次氧化制备多孔AAO的电流变化曲线和模板表面的形貌特点等进行了比较分析.二次、三次、四次氧化制备的AAO纳米孔孔径依次增大、孔间距减小,而模板表面的纳米孔有序性分布没有明显变化.控制一次氧化AAO模板的除膜时间,~10min即可得到孔径规则、高度有序的AAO膜.最后,利用所制备的不同孔深和孔径的AAO为模板,通过热纳米压印复制技术制备了长度和直径等性质可控的PMMA纳米柱阵列.
On the basis of anodized aluminum oxide (AAO) prepared by anodic oxidation, AAO was prepared by the second, third and fourth oxidation, and the current curve of porous AAO prepared by multiple oxidation and the shape of the template surface The pore size of AAO nanopore prepared by the second, third and fourth oxidation increases in turn, the pore spacing decreases, while the order of the nanopore on the template surface does not change significantly.Anodized AAO template , The AAO films with regular and highly ordered pores can be obtained at ~ 10min.Finally, AAO films with different pore depth and pore size were prepared and their properties of length and diameter were prepared by hot nanoimprint technique Controllable PMMA Nanopillar Array.