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对关节坐标测量机进行了简述,在此基础上介绍了关节坐标测量机原理、组成,并对其进行了误差分析。光电轴角编码器是其重要组成部分,圆光栅又是光电轴角编码器的核心部件。从理论上分析了圆光栅安装偏心误差对测量结果的影响。介绍了圆光栅分度误差测量方法,结合整个测量过程作出综述性的分析与评论。采用非线性拟合和插值的方法对该项误差进行调整和补偿。
A brief introduction is given to the joint coordinate measuring machine, on the basis of which, the principle and composition of the joint coordinate measuring machine are introduced and the error analysis is carried out. Photoelectric shaft encoder is an important part of it, the circular grating is the core part of the optical shaft encoder. The influence of eccentric error of the installation of circular grating on the measurement results is theoretically analyzed. The method of measuring the error of circular grating indexing is introduced, and the summary analysis and comment are made with the whole measuring process. The method of non-linear fitting and interpolation to adjust and compensate for the error.