论文部分内容阅读
研究了成分梯度对Ti-Al-N 系功能梯度薄膜结合强度的影响.实验结果表明:Ti-Al-N 系功能梯度薄膜的结合强度高于均质薄膜,且随着梯度的增加结合强度逐渐增加,这是由于梯度能够缓和应力以及薄膜中残余应力降低的缘故
The effect of composition gradient on the bonding strength of Ti-Al-N functional graded films was investigated. The experimental results show that the bonding strength of Ti-Al-N functional gradient film is higher than that of homogeneous film, and the bonding strength increases with the increase of gradient, which is due to the gradient can ease the stress and reduce the residual stress in the film