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为控制微通道内微流体流向,提出了一种声表面波关闭微通道方法。在128°旋转Y切割X传播方向的Li Nb O3压电基片上制作中心频率为27.5 MHz的叉指换能器,其激发的声表面波熔融聚二甲基硅氧烷微槽内固体石蜡,熔融后的石蜡由于毛细作用力沿微通道输运。当移去激发声表面波的电信号后,熔融石蜡固化并阻塞微通道,实现微通道关闭。以红色染料溶液为实验对象,对微通道进行关闭操作。结果表明,声表面波可以成功地实现微通道关闭操作,当电信号功率为31.7 d Bm时,微通道关断时间约为5 min。本文工作对声表面波为驱动源的微阀研究具有一定的借鉴意义。
To control the microfluidic flow in microchannels, a method of SAW-closing microchannels was proposed. An interdigital transducer with a center frequency of 27.5 MHz was fabricated on a Li Nb O3 piezoelectric substrate with 128 ° rotation Y-cut X propagation direction. The excited surface acoustic wave melted polydimethylsiloxane microchannel solid paraffin, The melted wax is transported along the microchannels by capillary forces. After removing the electrical signal that excites the SAW, the molten paraffin solidifies and blocks the microchannels, closing the microchannels. The red dye solution as the experimental object, the micro-channel to close operation. The results show that the SAW can successfully close the microchannels. When the electric signal power is 31.7 d Bm, the turn - off time of the microchannels is about 5 min. The work of this paper is of some reference to the study of the micro-valve with SAW as the driving source.