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利用CCD成像技术,设计出一种简单的测量垂直腔面发射激光器(VCSEL)的光束质量因子M2的方法。在注入电流分别为900mA,1500mA,3000mA和6000mA时,对出光孔径300μm,激射波长为980nm的垂直腔底面发射激光器的束腰等光束参数进行了测量,并应用激光光束传播的高斯方程拟合求得了M2因子的值分别为66,58,44和53。另外,当注入电流为900mA和3000mA时,对器件的远场分布进行了分析并测得了器件的远场发散角,测量值与理论计算值吻合较好。
Using CCD imaging technology, a simple method to measure the beam quality factor M2 of a vertical cavity surface emitting laser (VCSEL) is designed. When the injection current is 900mA, 1500mA, 3000mA and 6000mA respectively, the beam parameters such as the beam waist of the vertical cavity bottom emitting lasers with 300μm aperture and 980nm lasing wavelength are measured. The Gaussian equation of laser beam propagation is used to fit The M2 factor was calculated as 66, 58, 44 and 53, respectively. In addition, when the injection current is 900mA and 3000mA, the far-field distribution of the device is analyzed and the far-field divergence angle of the device is measured. The measured value is in good agreement with the theoretical calculation.