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采用网状化热释电靶面极大地改善了热释电摄象管的空间分辨率。本文叙述了在制备高质量网状化氘化硫酸三甘肽(DTGS)摄象管靶面的工艺技术和结构方面取得的进展。利用理论分析的结果来选择网状靶面的结构尺寸。用低能离子束研磨DTGS薄片而制得网状靶。本文论述了DTGS材料的蚀刻特性,并讨论了掩模材料、衬底材料和信号电极的选择。并大量地对摄象管的靶面进行扫描检测,以便找到成像性能和外观质量与靶面结构和蚀刻工艺之间的关系。由于这些研究,改进了最佳靶面的制备和工艺流程,从而使分辨率比平面靶管子有很大改善,并且获得了令人满意的成像。
The use of reticulated pyroelectric target greatly improves the spatial resolution of pyroelectric tube. This article describes the progress made in the process technology and structure for the preparation of high quality reticulated deuterated triglyceride sulfate (DTGS) tube targets. The results of theoretical analysis to select the mesh size of the target surface. DTGS flakes were ground with a low-energy ion beam to make a mesh target. This article discusses the etching properties of DTGS materials, and discusses the choice of mask materials, substrate materials, and signal electrodes. And scanned the target surface of the camera tube extensively to find the relationship between imaging performance and appearance quality and the structure of the target surface and the etching process. As a result of these studies, the best target surface preparation and process flow have been improved, resulting in much better resolution than planar target tubes and satisfactory imaging.