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报道了GaAs/InGaAs异质结双杨功率场效应晶体管的设计考虑、器件结构和制作,讨论了所采用的一些关键工艺,给出了器件性能。在12GHz下,最大输出功率≥130mW,增益≥12dB,功率附加效率≥30%。
The design considerations, device structures and fabrication of GaAs / InGaAs heterostructure double Yang power field-effect transistors are reported. Some key techniques are discussed and the device performances are given. At 12GHz, the maximum output power ≥ 130mW, gain ≥ 12dB, additional power efficiency ≥ 30%.