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正在研制的激光定位吊装结构工作台系统是电子束曝光机的主要组成部分。本文概述了工作台吊装结构的特点,用有限元法建立了吊装结构的三维实体力学模型,在理论上对其进行了静态特性的分析与计算,并用激光散斑法进行了实验验证,设计了工作台装配与调试的工艺支架。理论计算和实验分析充分证明工作台吊装结构能够满足电子束曝光机工作台亚微米定位精度的要求,具有独特的优越性。
The laser positioning and lifting structure workbench system under development is a major part of the electron beam lithography machine. In this paper, the characteristics of the hoisting structure of the workbench are summarized. The three-dimensional solid mechanics model of the hoisting structure is established by the finite element method. The static characteristics of the hoisting structure are analyzed and calculated theoretically. The laser speckle method is used to verify the design. Workbench assembly and commissioning process support. The theoretical calculation and experimental analysis fully prove that the workbench lifting structure can meet the submicron positioning accuracy of the electron beam exposure machine workbench, and has unique advantages.