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本文首先研究了具有通常柱间距(大于100 nm)的纳米柱阵列在近红外波段的光学特性并实现了通过改变阵列参数(如周期)来调制局域表面等离子体谐振.随后,通过使用电子束直写和离子束刻蚀的方法制备出具有超小柱间距(小于50 nm)和超高密度(ultrahigh density)的纳米柱阵列并通过对表面等离子体谐振的调制实现了在可见光波段滤出不同颜色的单色光.本文中所展示的纳米柱功能阵列可以与现有的数字光处理(digital light processing,DLP)技术相兼容进而构造具有超小像素的显示屏,可以在显示、成像等领域取得广泛的应用.
In this paper, we first investigate the optical properties of the nano-pillared array with near-infrared wavelength (usually more than 100 nm) and make it possible to modulate the local surface plasmon resonance by changing the array parameters (such as the period) Direct write and ion beam etching methods to prepare nanocolumn arrays with ultra-small column spacing (less than 50 nm) and ultrahigh density and by filtering the surface plasmon resonance Color monochromatic light.The nanopillar array shown in this article can be compatible with existing digital light processing (DLP) technology to create a display with ultra-small pixels for display, imaging, etc. Made a wide range of applications.