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磁控溅射沉积获得的非晶态WO3膜在空气中分别加热200℃，250℃，300℃，350℃及400℃，并保温30min进行热处理。随着热处理温度的提高，非晶态WO3膜的电致变色性能下降。当热处理温度高于350℃时，非晶态转变成结晶态。着色的结晶态WO3膜在可见光谱范围（0．38～0．78μm）及太阳光谱范围（0．34～2．5μm）内吸收调制能力低于非晶态WO3膜，但是结晶态WO3膜在近红外区有较强的反射调制。基片加温到220℃以上沉积得到的WO3膜均为结晶态。这种结晶态膜的电致变色性能优于空气中热处理得到的结晶态WO3膜，但两种膜的变色性能与各自的制备温度没有明显的依赖关系。在相同的电化学测试参数条件下，结晶的WO3膜的变色响应速率低于非晶态膜。利用X射线光电子能谱（XPS）及X射线衍射分析判定，结晶态WO3膜在HCl电解液中施加电信号发生着色／退色是由于H＋的注入／抽取所致，在着色的膜中存在着W6＋，W5＋及W4＋离子。
The amorphous WO3 films obtained by magnetron sputtering deposition were heated in air at 200 ℃, 250 ℃, 300 ℃, 350 ℃ and 400 ℃ respectively for 30min. As the heat treatment temperature increases, the electrochromic properties of the amorphous WO3 film decrease. When the heat treatment temperature is higher than 350 ° C, the amorphous state is transformed into a crystalline state. The colored crystalline WO3 films have lower absorption and modulation abilities than the amorphous WO3 films in the visible spectral range (0.38 ~ 0.78μm) and the solar spectral range (0.34 ~ 2.5μm) Near-infrared region has a strong reflection modulation. The substrate was heated to above 220 ℃ deposited WO3 film are crystalline. The electrochromic properties of this crystalline film are superior to the crystalline WO3 film obtained by heat treatment in air, but the color change properties of the two films have no obvious dependence on the respective preparation temperature. Under the same electrochemical parameters, the color reaction rate of crystalline WO3 film was lower than that of non-crystalline film. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XPS) analysis indicated that the colored / faded WO3 film was affected by the injection / extraction of H + ions in the HCl electrolyte. The W6 + , W5 + and W4 + ions.