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本文叙述肖特基高速四D触发器的设计与制造。采用肖特基箝位抗饱和技术及薄外延、对通隔离、浅结扩散、窄条光刻与深磷扩散等工艺,使T3175获得较好性能:最高计数频率大于75MHz,时钟脉冲传输延迟7～8ns。其交直流参数均达到Texas“S”系列同类品SN74S175水平。首批试制获得10％总成品率,表明设计与制造工艺适于批量生产。
This article describes the design and manufacture of Schottky high-speed four-D flip-flops. Using Schottky clamp anti-saturation technology and thin epitaxial, T3175 get better performance for the process of isolation, shallow junction diffusion, narrow strip lithography and deep phosphorus diffusion: the maximum count frequency is greater than 75MHz, the delay of clock pulse transmission is 7 ~ 8ns. Its AC and DC parameters are up to Texas “S” series of similar products SN74S175 level. The first trial of 10% of the total finished product rate, indicating that the design and manufacturing processes suitable for mass production.