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针对硅纳米线及其在生物、医学、环境、反恐应用中生物检测的制造需求,通过充分利用硅材料本身的特性,发展传统光刻、腐蚀工艺中的硅纳米线精细控制技术,研究硅纳米线传感界面上有序组装多种生物功能探针(包括蛋白质探针和基因探针)的制造方法,提出一致性良好的硅纳米线的自上而下批量制造方法及其表面生物识别和捕获性能的精确控制制造技术,为高灵敏度、高选择性的硅纳米线生物传感器件的制造及批量化奠定坚实的技术基础,并为基于硅纳米线及相关生物组装的跨尺度制造提供可借鉴的新原理和新方法.
In order to meet the manufacturing needs of biological detection in biological, medical, environmental and antiterrorism applications, silicon nanowires are used to develop the fine control technology of silicon nanowires in traditional photolithography and etching processes by making full use of the characteristics of silicon materials. Silicon nanowires A method for manufacturing a variety of biofunctional probes (including protein probes and gene probes) in an orderly assembly on a wire sensing interface is proposed, and a top-down batch manufacturing method of silicon nanowires with good consistency and a method for surface bio-recognition and Capture control of manufacturing technology for high sensitivity and high selectivity of silicon nanowires biosensor device manufacturing and batch technology to lay a solid foundation for technology and silicon based nanowires and related assembly of biological cross-scale manufacturing can provide reference New principle and new method.