用透射电镜研究了Ti/TiN多层膜的显微形貌,并用X射线衍射与透射电镜的微束电子衍射相结合的方法获得多层膜的晶体结构、相组成及其空间分布的信息。证明了Ti/TiN多层膜有明显的分层结构,在每对相邻的Ti层和TiN层之间,均存在Ti_2N界面过渡层,在膜基界面处存在FeTi过渡层。多层膜的晶粒呈纤维状,其尺寸随单层厚度的降低而减小,此即多层膜的晶粒细化效应,它伴随着膜层硬度的增加。 The microstructure of Ti / TiN multilayers was investigated by transmission electron microscopy. The crystal structure, phase composition and spatial distribution of the multilayers were obtained by the combination of X-ray diffraction and transmission electron microscopy. Ti / TiN multilayers have been proved to have obvious layered structure. Ti_2N interfacial transition exists between each pair of adjacent Ti and TiN layers, and the FeTi intercalation layer exists at the film-based interface. The grain of the multi-layer film is fibrous, its size decreases with the decrease of the thickness of the single layer, which is the grain refinement effect of the multi-layer film, which is accompanied by the increase of the hardness of the film layer.