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采用改进混合优化算法首次设计并制作了口径168.7 mm的连续衍射光学元件实现类环形光束入射,输出直径650μm超宽焦斑光束均匀照明。用Nd:YAG脉冲激光器1.064μm波长激光进行实验,获得了与设计尺寸相符、边缘陡峭、无中心尖锐脉冲、具有极好的离焦宽容性的宽焦斑,但焦斑顶部不均匀性较大。对此进行了深入的模拟分析,结果表明:焦斑顶部较大的光强调制主要来源于现有的工艺及实验条件误差。
An improved hybrid optimization algorithm was used to design and manufacture a continuous-diffraction optical element with a diameter of 168.7 mm for the first time to achieve a ring-like beam incident. The output beam with an ultra-wide beam with an output diameter of 650 μm was uniformly illuminated. Experiments with Nd: YAG pulsed laser 1.064μm wavelength laser show that the wide focal spot which is consistent with the design size, steep edge, no sharp center pulse and has excellent defocus tolerance, but the top of the focal spot is not uniform . The simulation results show that the larger intensity modulation at the top of the focal spot mainly comes from the existing process and experimental conditions.