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利用正交设计试验方法，找到了利用化学腐蚀法制作近场扫描光子显微镜尖端的主要影响因素及各因素的最佳组合水平状态，利用正交设计试验所得结果， 可制得曲率半径小于１２０ｎｍ 的尖端．
Using orthogonal design test method, the main influencing factors of the near field scanning photon microscope tip made by chemical etching method and the optimal combination level of each factor were found. By the results of orthogonal design test, the radius of curvature less than 120 nm Tip.