概述 随着集成电路器件制作技术趋严密,对硅片的性能也提出了更高的要求,这就迫切需要提供稳定、精确、无破坏性的测试仪器。Tencor公司仪器部生产的Sonogagept~2型无接触测试仪为硅片检测提供了简易准确、无接触的测试手段。该测试仪与众不同,它能在同一点位置上同时测试出整片硅片的厚度、晶片电阻、电阻率及掺杂型号,而不接触硅片的抛光表面。具有速度快、精度高、无沾污及较高的稳定性等特点,可检测硅片 Overview With the tighter fabrication of integrated circuit devices and the higher performance requirements of silicon wafers, there is an urgent need to provide stable, accurate and non-destructive test equipment. The Sonogagept ~ 2 contactless tester from Tencor Instruments provides a simple, accurate, contactless test for silicon inspection. The unique difference between the tester, which can simultaneously test the same piece of the entire thickness of the silicon wafer, wafer resistance, resistivity and doped models, without touching the polished surface of the wafer. With speed, high precision, non-staining and high stability and other characteristics, can detect silicon