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本文首次提出了溅射型空心阴极放电(SHCD)金属离子激光器的气体吸附动力学模型,建立了吸附速率的函数方程式,并通过实验得到了验证。
In this paper, the gas adsorption kinetics model of sputtering hollow cathode discharge (SHCD) metal ion laser was first proposed and the function equation of adsorption rate was established and verified by experiments.