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以静电感应晶闸管(SITH)的长期工艺实践为基础,总结和研究了器件结构参数对SITH主要性能参数的影响,并分析了其原因,提出了改善SITH器件性能的工艺和设计方法
Based on long-term process practice of electrostatic induction thyristor (SITH), the influences of device structure parameters on the main performance parameters of SITH are summarized and analyzed. The reasons for the improvement are also presented, and the process and design method for improving the performance of SITH devices are proposed