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研究开发了一种用于光学调整的二维压电驱动的纳米级微动工作台,建立了工作台的力学模型,并利用结构力学理论推导出工作台沿X、Y方向刚度及前二阶固有频率的解析式。通过微动工作台固有频率及沿X、Y方向刚度的实验测试,验证了解析方法和有限元方法用于微动工作台设计分析的可行性。有限元分析结果表明,可通过改变直角平板柔性铰链的特征参数,达到控制和优化工作台固有频率、输出位移、应力分布及驱动力响应的目的,并提出一种初选微动工作台柔性铰链参数的简易方法。
A two-dimensional piezoelectrically driven nanoscale micromotion table for optical adjustment was developed. The mechanics model of the table was established and the stiffness of the stage along the X and Y directions and the first order Analysis of natural frequency. The feasibility of the analytical method and the finite element method for the design of the fretting workbench is verified by experimental tests on the natural frequency of the fretting table and the stiffness in the X and Y directions. Finite element analysis results show that the purpose of controlling and optimizing worktable natural frequency, output displacement, stress distribution and driving force response can be achieved by changing the characteristic parameters of right-angled flat flexible hinge, Easy method of parameters.