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本文介绍高精度控制 Si 膜厚度的电化学腐蚀自停止新技术。讨论光照和电极欧姆接触等对腐蚀特性的影响,以及所得 Si 膜的质量。
This article describes a new technique for high-precision control of Si film thickness by electrochemical corrosion stop. Discuss the impact of light and electrode ohmic contact on the corrosion characteristics, as well as the quality of the resulting Si film.