本文对硅的电化学自致停腐蚀的原理作了简要分析，利用自制装置实现了硅电化学自致停腐蚀，成功制备出符合光波导要求的ＳＯＩ片。 In this paper, the principle of electrochemical self-stop corrosion of silicon was briefly analyzed. Self-stop electrochemical corrosion of silicon was achieved by using a self-made device. SOI sheets were successfully prepared in accordance with the optical waveguide requirements.