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4．几何形状导线的几何形状一尺寸、转角数目、台阶覆盖以及同一条线上宽度的变化对电迁移特性也有重要的影响。其中尺寸的影响在前面已经讨论过了，下面就其它几个方面进行讨论。转角会使电迁移寿命减小，图14显示了MTF与转角个数关系的实验结果。实验还发现，失效多出现在转
4. Geometrical shape and geometry of the wire One dimension, the number of corners, the step coverage, and the change in the width of the same line also have an important effect on electromigration characteristics. The impact of size has been discussed earlier, the following discussion of several other aspects. The corner will reduce the electromigration life, Figure 14 shows the experimental results MTF and the relationship between the number of corners. The experiment also found that the failure occurred in more turn