表面分析技术是一种新的测试技术,它对深入研究和了解与材料表面有关的各种现象有着十分重要的意义。不少学科的研究课题都与表面的分析研究密切相关,引起人们的广泛重视,电子能谱仪作为表面分析的主要手段,是测试分析中的关键设备之一。本文对表面分析技术的原理、特点作简要介绍,並举例说明它在测量光学薄膜方面的应用。 Surface analysis is a new testing technique that is of great importance for further research and understanding of various phenomena related to the surface of materials. Many subject research topics are closely related to the surface analysis and research, aroused widespread attention, as the main means of surface analysis, electronic spectrometer is one of the key equipment in the test analysis. This paper briefly introduces the principle and characteristics of surface analysis technology and gives an example of its application in the measurement of optical films.