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低温共烧陶瓷(LTCC)技术具有内埋置无源元件、集成度高、可靠性好以及优良的高频特性等特点,成为无线通讯系统中更具影响力与竞争力的技术之一。在了解现有工艺平台的基础上,利用集总参数元件进行带通滤波器的设计,使用高频电磁场仿真软件Ansoft HFSS建立滤波器的物理模型并对其进行仿真,经LTCC工艺线加工出中心频率为1 500 MHz、带宽为800 MHz的LC带通滤波器。成品经矢量网络分析仪Agilent E8358A测试,测试结果与仿真曲线吻合较好,都符合设计值的要求。最后对影响滤波器性能的一些关键工艺进行了分析,达到了将LTCC滤波器设计与工艺实现相结合的目的。
Low-temperature co-fired ceramic (LTCC) technology has the characteristics of embedded passive components, high integration, good reliability and excellent high frequency characteristics, becoming one of the more influential and competitive technologies in wireless communication systems. On the basis of understanding of the existing technology platform, the lumped parameters are used to design the band-pass filter. The high-frequency electromagnetic field simulation software Ansoft HFSS is used to establish the physical model of the filter and simulate it. The center of the LTCC is machined LC band-pass filter with a frequency of 1 500 MHz and a bandwidth of 800 MHz. Finished by the vector network analyzer Agilent E8358A test, the test results and simulation curves are in good agreement, are in line with the design value requirements. Finally, some key technologies that affect the performance of the filter are analyzed, which achieves the goal of combining LTCC filter design and process realization.