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微型的、可重复装配的、硅基的微光学实验平台和操作平台对于实现光学分析仪器的微型化具有重要的研究意义。设计制作了一种硅基的微光学平台,它包含有微光学基板和微光学夹持片。首先采用有限元分析软件Comsol对微光学夹持片的关键结构即弹片进行了应力仿真,确定了弹片在被拉伸过程中断裂时的最大位移,而后在此基础上设计了一种微光学基板和几种微光学夹持片。实验中采用微电子的工艺,通过配合使用电感耦合等离子体(ICP)干法刻蚀和各向异性湿法腐蚀工艺制备了微光学基板和微光学夹持片的样品。最后将二者装配在一起,从而建立起一个硅基的微光学平台。并且,夹持片可以在基板上实现滑动和重复装配。
Miniature, reusable, silicon-based micro-optical experiment platform and operating platform for the miniaturization of optical analysis instruments has important research significance. A silicon-based micro-optical platform is designed and manufactured. It contains a micro-optical substrate and a micro-optical clamping plate. Firstly, the finite element analysis software Comsol was used to simulate the key structure of the micro-optical clamping plate, namely the elastic plate. The maximum displacement of the elastic plate during the stretching process was determined, and then a micro-optical substrate And several micro-optical clamping pieces. Microelectronics was used in the experiment to fabricate samples of micro-optical substrates and micro-optics clips by inductively coupled plasma (ICP) dry etching and anisotropic wet etching. Finally, the two are assembled together to create a silicon based micro-optic platform. And, the clamping piece can slide and repeat assembly on the substrate.