论文部分内容阅读
本文分析了ＳＩＭＯＸ／ＳＯＩ和ＤＷＢ／ＳＯＩ结构的性能特点．尝试用ＤＷＢ／ＳＯＩ材料制备不同波导层厚度的平面光波导样品，并测试了１．１５μｍ和１．５２３μｍ激光的ＴＥ和ＴＭ模的传输损耗．１．５２３μｍ光的ＴＥ模的最小传输损耗已达０．２７ｄＢ／ｃｍ．说明ＤＷＢ／ＳＯＩ材料是一种有潜力的光波导材料．
This article analyzes the performance characteristics of SIMOX / SOI and DWB / SOI structures. Attempts were made to fabricate planar waveguide samples with different waveguide layer thicknesses using DWB / SOI materials and to test the transmission loss of TE and TM modes for 1.15μm and 1.523μm lasers. The minimum transmission loss of 1.523μm TE mode has reached 0.27dB / cm. Description DWB / SOI material is a potential optical waveguide material.