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利用多弧离子镀技术并使用T-i Al(原子百分比50∶50)合金靶与Zr单质靶组合在高速钢基体上镀覆(Ti,Al,Zr)N硬质反应膜。使用螯合剂、氧化剂、缓蚀剂及氢氧化钠配制膜层退除液,通过改变退除液各组元的浓度、退除液PH值和退膜温度等影响因素,考查(Ti,Al,Zr)N硬质反应膜的退除效果。分析了高速钢基体和退膜前后试样的表面形貌、成分和粗糙度。比较了退除液组元的不同组合、不同浓度、退除液不同PH值条件下镀膜试样表面形貌随时间的变化,进而确定了退除液的最佳组元组合及最佳退除膜层工艺,实现了高速钢基体上(Ti,Al,Zr)N膜的完全退除,退膜后的试样表面光亮,无腐蚀损伤。
A (Ti, Al, Zr) N hard reactive film was coated on a high speed steel substrate by a multi-arc ion plating technique and a combination of a T-i Al alloy target and a Zr single-target. The chelating agent, oxidant, corrosion inhibitor and sodium hydroxide were used to prepare the solution for removing the film layer. Factors such as the pH of the solution and the temperature of the film were removed by changing the concentrations of the components in the solution, Zr) N hard reactive film. The surface morphology, composition and roughness of high speed steel substrate and samples before and after filming were analyzed. The changes of surface topography of coated samples under different pH, different concentrations and different pH values were compared, and the best combination of components and the best removal of the solution were determined Film process to achieve the complete removal of (Ti, Al, Zr) N film on the high speed steel substrate. The surface of the sample after film delamination is bright and non-corrosive.