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采用多弧离子镀技术并使用合金靶Ti-Al-Zr制备(Ti,Al,Zr)N多元超硬梯度膜。利用扫描电镜、X衍射仪对(Ti,Al,Zr)N膜层表面、断面形貌、成分、结构进行观察测定;系统考察了沉积工艺对(Ti,Al,Zr)N膜层质量、膜/基附着力和硬度的影响;并对膜层抗热震性进行了研究。通过与TiN,(Ti,Al)N,(Ti,Zr)N等硬质膜进行比较,发现采用Ti-Al-Zr合金靶制备的(Ti,Al,Zr)N多元梯度膜有更高的硬度和膜/基附着力,硬度可达4000 HV,实现了从硬质膜到超硬膜的转变;膜/基附着力大于200 N,同时对沉积工艺有较强的适应性。
(Ti, Al, Zr) N multiple superhard gradient films were prepared by using multi-arc ion plating technique and Ti-Al-Zr alloy target. The surface, cross-sectional morphology, composition and structure of (Ti, Al, Zr) N coatings were observed by scanning electron microscopy and X-ray diffractometer. The effects of deposition process on the film quality, / Base adhesion and hardness; and thermal shock resistance of the film were studied. Compared with hard films such as TiN, (Ti, Al) N, (Ti, Zr) N, the (Ti, Al, Zr) N multivariate graded films prepared with Ti-Al-Zr alloy target were found to have higher Hardness and film / base adhesion, the hardness of 4000 HV, to achieve from the hard film to the superhard film changes; film / base adhesion greater than 200 N, while the deposition process has strong adaptability.