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利用脉冲等离子体增强化学气相沉积系统沉积了含氮类金刚石碳薄膜.利用X射线光电子能谱和红外光谱分析了薄膜的化学键状态,在UMT摩擦磨损试验机上考察了薄膜的摩擦学性能,利用扫描电子显微镜分析了摩擦对偶球表面的转移膜形貌.结果表明:随着薄膜中氮含量的增加,薄膜中的sp2C含量增加,硬度有所降低,薄膜的平均摩擦系数先减小后增加.
The nitrogen-containing diamond-like carbon films were deposited by pulsed plasma enhanced chemical vapor deposition (CVD). The chemical bonding state of the films was analyzed by X-ray photoelectron spectroscopy and infrared spectroscopy. The tribological properties of the films were investigated on a UMT friction and wear tester. The morphology of the transfer film on the surface of the frictional couple sphere was analyzed by electron microscope.The results showed that with the increase of nitrogen content, the content of sp2C in the film increased, the hardness decreased, and the average friction coefficient of the film decreased first and then increased.