采用酸溶液处理方法对垂直于衬底生长的碳纳米管阵列的纯化进行了研究. 利用扫描电子显微镜、X 射线光电子能谱等手段对纯化前后的碳纳米管阵列的结构、形貌及化学组成进行表征. 实验结果表明, 通过控制条件, 酸溶液处理方法能够在有效地去除催化剂粒子等杂质的同时又保持阵列的相对完整性. 纯化后的碳纳米管阵列会促进其在电子学领域的进一步应用. The purification of carbon nanotube arrays grown perpendicular to the substrate was studied by acid solution treatment.The structure, morphology and chemical composition of the carbon nanotube arrays before and after purification were characterized by scanning electron microscopy and X-ray photoelectron spectroscopy .The experimental results show that the acid solution treatment can effectively remove the impurities such as catalyst particles and maintain the relative integrity of the array through the control conditions.The purified carbon nanotube array will promote its further in the field of electronics application.