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1.56米天文望远镜片镀铝的高真空镀膜设备,是继2.2米天文望远镜后的国内第二台大型高真空镀膜设备,为我国华东地区制备1.56米及以下规格镜片的镀铝提供了良好设备。同时该设备还考虑了介质膜的制备等,为扩大其使用范围提供了保证。一、真空度的选取根据理想气体分子运动平均自由程公式 p=5×10~(-3)/λ在选取的R、h内,从蒸发源到镜面的最远点平均自由程为λ_ 0。则要求最低真空度
1.56 m astronomical telescope piece aluminized high vacuum coating equipment is the second large high vacuum coating equipment in China after 2.2 m astronomical telescope and provides a good equipment for the aluminum plating of 1.56 m and below specifications in East China. At the same time the device also considered the preparation of dielectric film, etc., to expand the scope of its use to provide a guarantee. First, the selection of the degree of vacuum According to the ideal gas molecules free mean equation of motion p = 5 × 10 ~ (-3) / λ in the selected R, h, from the evaporation source to the mirror the furthest point average free path for λ_0 . The minimum vacuum is required