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  5. 粘性基底上溅射薄膜褶皱的边界效应研究

粘性基底上溅射薄膜褶皱的边界效应研究

来源 :固体力学学报 | 被引量 : 0次 | 上传用户：asunsky1
【摘 要】
：
复杂的表面微结构在自然界中普遍存在,它们赋予生物组织优异的物化功能.受此启发,各类仿生结构在工程领域(如微机电系统、能源材料、生物传感等)得到了广泛应用.论文利用磁控溅射技术在粘性的胶体基底上沉积金属铁薄膜,研究了薄膜中自发形成的褶皱结构,重点分析了约束边界和膜厚梯度边界对褶皱形貌的调控效应.实验发现,随着膜厚的增加,薄膜表面由网状折叠逐渐演变为迷宫褶皱,褶皱波长先是略微下降,随后保持不变.约束边界附近,褶皱波长连续变化,表现为多级褶皱的特征.膜厚梯度区域,褶皱具有明显取向,而波长基本不变.基于应力理论,
【作 者】
：
余森江 郭永杰 赵晓宇 卢晨曦 李领伟 
【机 构】
：
杭州电子科技大学材料与环境工程学院,浙江省新型传感材料重点实验室,杭州,310018
【出 处】
：
固体力学学报
【发表日期】
：
2022年1期
【关键词】
：
粘性基底 薄膜 褶皱 边界效应 溅射 
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论文部分内容阅读
复杂的表面微结构在自然界中普遍存在,它们赋予生物组织优异的物化功能.受此启发,各类仿生结构在工程领域(如微机电系统、能源材料、生物传感等)得到了广泛应用.论文利用磁控溅射技术在粘性的胶体基底上沉积金属铁薄膜,研究了薄膜中自发形成的褶皱结构,重点分析了约束边界和膜厚梯度边界对褶皱形貌的调控效应.实验发现,随着膜厚的增加,薄膜表面由网状折叠逐渐演变为迷宫褶皱,褶皱波长先是略微下降,随后保持不变.约束边界附近,褶皱波长连续变化,表现为多级褶皱的特征.膜厚梯度区域,褶皱具有明显取向,而波长基本不变.基于应力理论,对粘性基底上薄膜褶皱的形貌特征、演化规律和物理机制进行了深入分析.该研究将有助于加深对粘性基底上金属薄膜的溅射效应的理解,并有望通过设计图案化结构实现可控的表面微结构.
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