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采用等离子体基离子注入沉积技术以乙炔和氢气为气源,在造币模具钢表面制备了类金刚石碳(DLC)膜。采用划痕试验研究了在不同工艺参数下制备的DLC膜在与钢基体的结合力及其变化规律。结果表明,DLC膜临界载荷随着注入电流增加和注入电压降低而增加;随着C2H2/H2比例的增加,临界载荷先增加后减小;随着气压的增加,临界载荷也表现出先增加后减小的趋势。结合SEM分析结果对DLC膜剥落机制进行了探讨,表明DLC膜在划擦过程中首先发生膜和基体之间的层裂剥离,然后在垂直载载作用下发生破裂。
Using plasma-based ion implantation deposition technology, diamond-like carbon (DLC) films were prepared on the surface of coin-operated mold steel by using acetylene and hydrogen as the gas source. Scratch test was used to study the binding force of DLC film prepared under different process parameters and its variation with steel substrate. The results show that the critical load of DLC film increases with the increase of injection current and the decrease of injection voltage. With the increase of C2H2 / H2 ratio, the critical load first increases and then decreases. With the increase of pressure, the critical load also increases first and then decreases Small trend. Combined with SEM analysis, the mechanism of DLC film spalling was discussed, which showed that the delamination between the film and matrix occurred firstly and then ruptured under the vertical loading.