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采用Ti-Ni及Ag-Cu-Ti为过渡层材料实现了Al2O3陶瓷与Kovar合金的热等静压扩散连接。利用金相显微镜、SEM、EDS和万能试验机等测试分析了Al2O3/Kovar扩散接头的显微组织、界面反应及剪切强度。结果表明,Al2O3/Ti-Ni/Kovar接头连接界面处无孔洞等显微缺陷,但其强度及气密性较低,剪切强度及漏率分别为67 MPa及约2.0×10-10Pa·m3/s;Al2O3/Ag-Cu-Ti/Kovar接头之间界面连接良好,无明显显微缺陷,接头强度及气密性较高,剪切强度及漏率分别为85 MPa及<0.5×10-10Pa·m3/s。
Adopting Ti-Ni and Ag-Cu-Ti as transitional layer material, the hot isostatic pressing diffusion connection of Al2O3 ceramic and Kovar alloy was realized. The microstructure, interfacial reaction and shear strength of Al2O3 / Kovar diffusion joints were analyzed by metallographic microscope, SEM, EDS and universal testing machine. The results show that the interface of Al2O3 / Ti-Ni / Kovar joints has no defects such as pores, but its strength and airtightness are lower. The shear strength and leakage rate are 67 MPa and 2.0 × 10-10 Pa · m3, respectively / s. The interfacial connection between Al2O3 / Ag-Cu-Ti / Kovar joints is good with no obvious microscopic defects. The joint strength and airtightness are high. The shear strength and leakage rate are 85 MPa and <0.5 × 10- 10Pa · m3 / s.